Some fundamental aspects of elementary gas-surface interactions

Authors
Cacciatore, M
Citation
M. Cacciatore, Some fundamental aspects of elementary gas-surface interactions, PUR A CHEM, 71(10), 1999, pp. 1809-1817
Citations number
39
Categorie Soggetti
Chemistry
Journal title
PURE AND APPLIED CHEMISTRY
ISSN journal
00334545 → ACNP
Volume
71
Issue
10
Year of publication
1999
Pages
1809 - 1817
Database
ISI
SICI code
0033-4545(199910)71:10<1809:SFAOEG>2.0.ZU;2-P
Abstract
Some of the most recent results obtained in theoretical studies on the dyna mics of elementary gas-surface processes are presented and discussed. In pa rticular, we give examples of the importance of electronic structure calcul ations, classical and semiclassical dynamics simulations for understanding the fundamental features of surface reactions relating to plasma processing and plasma-wall interactions.