Development of ISFET in a commercial CMOS technology

Authors
Errachid, A Merlos, A Bausells, J Carrabina, J
Citation
A. Errachid et al., Development of ISFET in a commercial CMOS technology, QUIM ANAL, 18, 1999, pp. 62-64
Citations number
9
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences
Journal title
QUIMICA ANALITICA
ISSN journal
02120569 → ACNP
Volume
18
Year of publication
1999
Supplement
1
Pages
62 - 64
Database
ISI
SICI code
0212-0569(1999)18:<62:DOIIAC>2.0.ZU;2-G
Abstract
Ion-sensitive field-effect transistor (ISFETs) has been fabricated with sil icon oxynitride as the gate for the measurement of pH in liquid solutions. Only the standard CMOS technology from Atmel-ES2 has been used, without any post-processing. The characterization of these ISFETs has been performed. Good operation of the devices has been shown.