CAPACITIVE METHODS OF SEMICONDUCTOR PURITY CONTROL

Authors
Citation
Ls. Berman, CAPACITIVE METHODS OF SEMICONDUCTOR PURITY CONTROL, Semiconductors, 31(6), 1997, pp. 649-649
Citations number
NO
Categorie Soggetti
Physics, Condensed Matter
Journal title
ISSN journal
10637826
Volume
31
Issue
6
Year of publication
1997
Pages
649 - 649
Database
ISI
SICI code
1063-7826(1997)31:6<649:CMOSPC>2.0.ZU;2-U