A new tool with which to monitor the quality (roughness and subsurface dama
ge) of optical surfaces during grinding and polishing, intensity-detecting
total internal reflection microscopy (iTIRM), is presented. A general descr
iption of the new measurement method is given, followed by a description of
the experimental in situ measurement setup. Experimental results of the me
thod are presented that demonstrate that iTIRM can be used either to contro
l the roughness-reduction process during production or to investigate the p
rocess itself. The possibility of implementing the method in an optical wor
kshop is discussed. (C) 2000 Optical Society of America. OCIS codes: 120.42
90, 120.6660, 220.4610, 220.4840, 220.5450.