Recombination of neutral oxygen atoms on stainless steel surface

The recombination coefficient of neutral oxygen atoms on polycrystalline AI SI 304 stainless steel surface was determined experimentally. The source of neutral oxygen atoms was an inductively coupled RF oxygen plasma. The dens ity of oxygen atoms was determined with a nickel catalytic probe and was be tween 3 X 10(19) and 2 X 10(21) m(-3). A virgin stainless steel disc was ac tivated by exposure to atomic oxygen at the density of 1.5 X 10(21) m(-3) f or 120 s. During the activation, a layer of oxide with the thickness of abo ut 10 nm was formed on the surface. After successful activation, the temper ature of the stainless steel disc during exposures to atomic oxygen was mea sured at different O density and different pressure in the system. It was f ound that the recombination coefficient was a constant at the value of 0.07 0 +/- 0.009. (C) 2000 Elsevier Science B.V. All rights reserved.