Deposition of small clusters on surface: a molecular dynamics simulation

By using the molecular dynamics simulation, we have studied the dynamic beh aviors of small energetic clusters deposited on the surface. We find that, at incident energy as low as 1.0 cV/atom, the structure of the cluster is d estroyed and cluster atoms form an epitaxial layer above the surface. At hi gh energy incidence, the site exchange between cluster atom and surface ato m is observed. The effects of the cluster size and orientation are discusse d.