VDF-TRFE COPOLYMER PYROELECTRIC SENSOR

A new generation of thermal uncooled focal plane array has been develo ped in the context of PROMETHEUS PROCHIP European Program (EUREKA) as a passive infrared obstacle detection applied to automotive [1]. The i nfrared detection uses the pyroelectric effect in VDF/TrFE copolymer. VDF/TrFE pyroelectric sensors have now definitely reached the level of a product. Based on a bidimensional matrix array, it can be considere d as a whole system with a monolithic technology processed on an indus trial silicon substrate provided with the integrated CMOS readout circ uit. The paper will describe the main procedures dealing with the fabr ication of a 32 x 32 - 100 mu m pitch - Focal Plane Array (FPA) develo ped for very low cost infrared applications. The design architecture, a complete model of detection and the sensor performances are presente d.