R. Feeney et Sp. Kounaves, Microfabricated ultramicroelectrode arrays: Developments, advances, and applications in environmental analysis, ELECTROANAL, 12(9), 2000, pp. 677-684
The wider availability of microlithographic techniques for the fabrication
of electrochemical devices has led to a significant increase in the develop
ment of microfabricated arrays of microelectrodes and their use in a wide v
ariety of analytical problems. The major microfabrication steps and the cap
abilities and limitations of this microsensor technology are reviewed in th
is article. Several examples are summarized to illustrate the breadth of wo
rk with silicon-based microelectrode arrays, with special emphasis on their
use for environmental analysis in a range of diverse settings including re
mote electroanalysis on Mars.