Microfabricated ultramicroelectrode arrays: Developments, advances, and applications in environmental analysis

The wider availability of microlithographic techniques for the fabrication of electrochemical devices has led to a significant increase in the develop ment of microfabricated arrays of microelectrodes and their use in a wide v ariety of analytical problems. The major microfabrication steps and the cap abilities and limitations of this microsensor technology are reviewed in th is article. Several examples are summarized to illustrate the breadth of wo rk with silicon-based microelectrode arrays, with special emphasis on their use for environmental analysis in a range of diverse settings including re mote electroanalysis on Mars.