Plucked excitation of micromachined silicon DETF resonators

Authors
Beeby, SP Ensell, G Lambert, R White, NM
Citation
Sp. Beeby et al., Plucked excitation of micromachined silicon DETF resonators, ELECTR LETT, 36(13), 2000, pp. 1119-1120
Citations number
3
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
ELECTRONICS LETTERS
ISSN journal
00135194 → ACNP
Volume
36
Issue
13
Year of publication
2000
Pages
1119 - 1120
Database
ISI
SICI code
0013-5194(20000622)36:13<1119:PEOMSD>2.0.ZU;2-9
Abstract
A mechanism for driving micro-mechanical silicon double-ended tuning fork ( DETF) resonators by statically deforming and then releasing the tines is de scribed. In this way, the structure vibrates at its natural frequency and t he influence of the driving force is removed.