A miniaturized optical set-up based on a CDROM player optic was developed f
or LAPS (light addressable potentiometric sensors). A focus of 2.6 mu m was
achieved using this easy to handle device. The lateral resolution of LAPS
measurements can be improved by using GaAs as the semiconductor material in
stead of Si. The diffusion length of the minority charge carriers was deter
mined to be smaller than 3.1 mu m. A new method called SPIM (scanning photo
-induced impedance microscopy) is described. Using this technique, the impe
dance of thin films can be measured with lateral resolution.