Fatigue properties of lanthanum strontium manganate-lead zirconate titanate epitaxial thin film heterostructures produced by a chemical solution deposition method
F. Mcnally et al., Fatigue properties of lanthanum strontium manganate-lead zirconate titanate epitaxial thin film heterostructures produced by a chemical solution deposition method, J MATER RES, 15(7), 2000, pp. 1546-1550
A liquid-precursor process was used to produce an epitaxial all-oxide ferro
electric memory device structure. The lanthanum strontium manganate-lead zi
rconate titanate-lanthanum strontium manganate (LSMO-PZT-LSMO) structure us
ed for this device shows excellent polarization and fatigue behavior with a
remnant polarization P-r of 42 mu C/cm(2) and a coercive field E-c of 68 k
eV. The polarization was found to only slightly degrade after over 10(10) f
atigue cycles. This behavior is contrasted with epitaxial PZT using a metal
top electrode. In addition, the use of a top LSMO electrode was a sufficie
nt barrier to Pb loss during heating to allow subsequent (or prolonged) hea
t treatments that would generally lead to Pb loss.