Single-crystalline tungsten nanoparticles produced by thermal decomposition of tungsten hexacarbonyl

Nanometer-sized particles of W are of interest in semiconductor device rese arch, where such particles may store electrons inside heteroepitaxially def ined structures. In this paper, we present results concerning W particles p roduced by thermal decomposition of tungsten hexacarbonyl. By the described method, it was possible to produce size-selected, single-crystalline W par ticles in the size range between 15 and 60 nm. The sintering behavior of th e particles was studied between ambient temperatures and 1900 degrees C. Th e particle morphology and structure were examined with high-resolution tran smission electron microscopy and electron diffraction techniques. Particles sintered at the highest temperatures typically were single crystals, with well-developed facets. Some problems concerning a yield reducing charging m echanism sue discussed.