H. Yamaoka et al., X-RAY-SCATTERING FROM NONIDEAL CZOCHRALSKI SILICON-CRYSTALS FOR HIGH-ENERGY SYNCHROTRON-RADIATION, JPN J A P 1, 36(5A), 1997, pp. 2792-2799
Nonideal Czochralski (CZ) silicon crystals were characterized systemat
ically by double-crystal and triple-crystal diffractometry in the Brag
g case for high energy synchrotron radiation. The crystals were either
annealed at 780 degrees, 1000 degrees C, and 1170 degrees C, or lappe
d, with a mean abrasive particle sizes of 13 mu m, 25 mu m, and 42 mu
m. Triple-crystal diffractometry by use of a Mo rotating-anode X-ray g
enerator. Physical properties of the annealed and lapped crystals were
studied quantitatively with respect to mosaic spread and lattice para
meter fluctuation.