X-RAY-SCATTERING FROM NONIDEAL CZOCHRALSKI SILICON-CRYSTALS FOR HIGH-ENERGY SYNCHROTRON-RADIATION

Nonideal Czochralski (CZ) silicon crystals were characterized systemat ically by double-crystal and triple-crystal diffractometry in the Brag g case for high energy synchrotron radiation. The crystals were either annealed at 780 degrees, 1000 degrees C, and 1170 degrees C, or lappe d, with a mean abrasive particle sizes of 13 mu m, 25 mu m, and 42 mu m. Triple-crystal diffractometry by use of a Mo rotating-anode X-ray g enerator. Physical properties of the annealed and lapped crystals were studied quantitatively with respect to mosaic spread and lattice para meter fluctuation.