The role of energetic atoms in the deposition of Au/Au (001) thin films - a computer simulation study

The behavior of Au/Au (100) thin film growth with energetic deposition has been investigated by kinetic Monte Carlo simulations with the description o f the deposition process of energetic atoms based on molecular dynamics sim ulation results. We present the simulation results on the morphology, islan ds distribution, Bragg intensity and roughness of homoepitaxial Au (100)-fi lms growth with energetic deposition at various substrate temperatures. We found the energetic atoms can promote the nucleation and island growth in t he early stages of film growth and thus enhance the smoothness of the him s urface at the temperatures of film growth in three-dimensional mode and in quasi-two-dimensional mode. The atomistic mechanism that promotes the nucle ation and island growth and enhances the smoothness of the film surface is discussed. (C) 2000 Elsevier Science S.A. All rights reserved.