Study on high dose iron ion implantation in aluminum foil

Iron was implanted to different implantation doses (1x10(17)-1 X 10(18) cm( -2)) at different average beam fluxes (25-76 mu A cm(-2)) in high purity al uminum foil by using a metal vapor vacuum are ion implanter. The maximum th ickness of the implanted cm layer can range between 350 and 400 nm for the highest dose of 1 X 10(18) cm(-2). Upon implantation dose and average beam flux, the retained concentration of Fe implants ranges between 22 at.% and lower than 10 at.%. Two crystal phases, i.e. Fe2Al5 and FeAl6, are formed i n the samples which were implanted to a dose larger than or equal to 5 X 10 (17) cm(-2) at an average beam flux of 51 mu A cm(-2). The ratio of Fe2Al5 to FeAl6 increases with increasing implantation dose and average beam flux. The effect of implantation conditions on Mossbauer parameters is given. Mo ssbauer measurement reveals that there exists an amorphous state in the spe cimen implanted to the lowest implantation dose of 1 x 10(17) cm(-2) at the smallest average beam flux of 25 mu A cm(-2) (C) 2000 Elsevier Science S.A . All rights reserved.