Structural and phase composition changes in aluminium induced by carbon implantation

The results of Rutherford backscattering analysis, Auger electron spectrosc opy, transmission electron microscopy and X-ray diffraction analysis of the surface aluminium layer after carbon implantation are presented in this wo rk. The energy of implanted ions was 20 keV, the implantation dose varied i n the range of 0.4-4.0 x 10(17) ions/cm(2). The growth of carbon implantati on dose resulted in an increase of carbon concentration over the stoichiome tric level. Phase composition analysis showed that carbon implantation led to the formation of a Al4C3 compound. The possible mechanism of carbide for mation based on ion-induced crystallisation was proposed. The behaviour of stress induced by carbon implantation in the aluminium lattice was also dis cussed. (C) 2000 Elsevier Science S.A. All rights reserved.