Structural and optical properties of yttria-stabilized-zirconia films grown by MOCVD

The morphology of yttria doped zirconia thin films deposited by metal organ ic chemical vapour deposition (MOCVD) in two different substrate materials, glassy quartz and sapphire single crystals has been examined. The Y2O3 dop ing concentration has been varied from 3 to 12 mol percent. Structural char acterization has been realized by X-ray diffraction, raman spectroscopy and scanning electron microscopy. The structure of the films corresponds to th at of bulk crystals of the same composition. Refractive index has been dete rmined by the optical transmission method. Refractive index close to those of bulk crystals are obtained for epitaxially grown zirconia on sapphire su bstrates, whereas low refractive index values, related with low packing den sities, are obtained for thin films in the glassy substrate. (C) 2000 Elsev ier Science S.A. All rights reserved.