Citation
Y. Segui et A. Ricard, Plasma reactors for cleaning surfaces, VIDE, 54(294), 1999, pp. 383-392
Citations number
12
Categorie Soggetti
Material Science & Engineering
Journal title
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS
ISSN journal
12660167
→ ACNP
Volume
54
Issue
294
Year of publication
1999
Pages
383 - 392
Database
ISI
SICI code
1266-0167(1999)54:294<383:PRFCS>2.0.ZU;2-B