Resolution deterioration in emission electron microscopy due to object roughness

In the present paper a general analytic expression has been obtained and co nfirmed by a computer simulation which links the surface roughness of an ob ject under study in an emission electron microscope and it's resolution. A quantitative derivation was made for the model case when there is a step on the object surface. It was shown that the resolution is deteriorated asymm etrically relative to the step. The effect sets a practical limit to the ul timate lateral resolution obtainable in an emission electron microscope.