Self-calibration experiment of silicon photodiodes in the soft X-ray spectr
al region of synchrotron radiation (50-2000eV) is carried out. Because of e
limination of "dead region" and adoption of very thin SiO2 layer as window
of the silicon photodiode, a simple model can be used to analyze the proces
s. Based on parameters measured by experiment, the quantum efficiency of th
e silicon photodiode is calculated, and the flux of incident synchrotron ra
diation is also obtained.