SINGLE PROCESS TO DEPOSIT LEAD-ZIRCONATE-TITANATE (PZT) THIN-FILM BY A HYDROTHERMAL METHOD

Authors
MORITA T KANDA T YAMAGATA Y KUROSAWA M HIGUCHI T
Citation
T. Morita et al., SINGLE PROCESS TO DEPOSIT LEAD-ZIRCONATE-TITANATE (PZT) THIN-FILM BY A HYDROTHERMAL METHOD, JPN J A P 1, 36(5B), 1997, pp. 2998-2999
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
36
Issue
5B
Year of publication
1997
Pages
2998 - 2999
Database
ISI
SICI code
Abstract
The hydrothermal method to deposit lead zirconate titanate (PZT) thin film is anew method reported by Tsurumi et al. in 1991. This method co nsists of two linked processes. We have found that the film deposited by the first process is not PZT but separated lead zirconate (PZ) and lead titanate (PT). In this paper, we report that a PZT thin film was successfully deposited by a single process. The chemical construction and composition of the film were analyzed. The Zr/(Zr+Ti) ratio of the PZT film was controlled by changing the ionic composition of the solu tion.