Optoelectronic devices based on lateral p-n junctions fabricated by molecular-beam epitaxy growth of silicon-doped GaAs on patterned (311)A-oriented substrates
Po. Vaccaro et K. Fujita, Optoelectronic devices based on lateral p-n junctions fabricated by molecular-beam epitaxy growth of silicon-doped GaAs on patterned (311)A-oriented substrates, IEEE J Q EL, 36(7), 2000, pp. 849-857
We demonstrate light-emitting diodes, a vertical-cavity surface-emitting la
ser (VCSEL), and a photodiode fabricated using a lateral p-n junction. The
lateral p-n junction is formed in a GaAs-silicon doped layer grown by molec
ular-beam epitaxy on a patterned GaAs (311)A-oriented substrate. Lateral p-
n junctions have particular properties (i.e., small junction area, coplanar
contact geometry, can be clad between electrically insulating layers, allo
w carrier transport in the plane of multilayer structures, etc.) that are p
romising for application in new devices. Light-emitting diodes exhibit good
electroluminescence at room temperature for both GaAs single layers and Ga
As-AlGaAs multiple-quantum-well structures. The VCSEL has electrically insu
lating distributed Bragg reflectors and coplanar contacts which simplify th
e device Fabrication process. Pulsed-mode operation at room temperature was
obtained with a threshold current of 2.3 mA. The light-emission spectrum h
as a single peak at 942 nm with a full-width at half-maximum of 0.15 nm, Th
e photodiode design allows a reduction of the junction capacitance and an i
ncrease of the response speed. A nonoptimized device exhibited a time const
ant of 10 ps.