Vertically integrated sensors for advanced imaging applications

A thin film on ASIC (TFA) image sensor is fabricated depositing an amorphou s silicon thin-film detector onto a CMOS ASIC, With regards to advanced ima ging systems, TFA provides enhanced performance and more flexibility than c onventional technologies. Extensive on-chip signal processing is feasible, as well as small pixels for high-resolution imagers, Two new TFA imager pro totypes have recently been fabricated, High-resolution image sensor (HIRISE II) with 1024 x 128 pixels is an active pixel sensor suited for digital ph otography. Local autoadaptiver sensor (LARS II) with 368 x 256 pixels split s the illumination information into two signals, thereby providing a dynami c range of more than 120 dB, as required by automotive applications, Both p rototypes include correlated double sampling and double delta sampling for efficient suppression of fixed pattern noise.