The feasibility of utilizing PZT films as future data storage media was inv
estigated using a modified AFM. Applying voltages between a conductive AFM
tip and the PZT films causes the switching of ferroelectric domains. The do
mains are observed using an EFM imaging technique. The experimental results
and calculations revealed that the electrostatic force generated between t
he polarized area and the tip is a main contributor for the imaging of the
polarized domains. The written features on ferroelectric films were less th
an 100 nm in diameter, implying the possibility of realizing data storage d
evices with ultra-high area density. The disappearance of the polarized ima
ges without any applied voltage was observed, which is a drawback in this a
pplication of PZT thin films.