Cu/Fe layers produced by molecular beam epitaxy were subjected to 360 keV A
r+ irradiation at 180 K and 295 K over a range of ion fluences from 2.0 x 1
0(15) to 5.0 x 10(16) ions cm(-2). Rutherford backscattering spectrometry a
nd x-ray diffraction were used to monitor the evolution of the interfaces a
fter each step of irradiation. Up to fluences of approximately 5 x 10(15) A
r+ cm(-2), at both substrate temperatures, a moderate decrease of the initi
al Cu edge variance was observed. At higher fluences an inter-diffusion of
the lavers was noticed. The results are interpreted as being caused by stre
ss effects and plastic deformation.