The effect of argon ion irradiation on vacuum-evaporated as-grown Sb2Te3 fi
lms in a dense plasma focused device (DPF) was studied by structural, compo
sitional, and morphological analyses. The as-grown films consisted of both
stoichiometric and nonstoichiometric Sb2Te3 phases with traces of Te. Ion e
nergy greater than 1 MeV promoted the formation of nonstoichiometric SbxTe1
-x phase and the oxidation of Sb. Ion energy less than 1 MeV promoted the f
ormation of single stoichiometric Sb2Te3 phase and a homogeneous distributi
on of grain size with preferred orientation. (C) 2000 Elsevier Science Ltd.
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