Reflection from surfaces with a thin overlayer

Authors
Fechtchenko, RM Vinogradov, AV
Citation
Rm. Fechtchenko et Av. Vinogradov, Reflection from surfaces with a thin overlayer, OPTICS LETT, 25(14), 2000, pp. 998-1000
Citations number
13
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTICS LETTERS
ISSN journal
01469592 → ACNP
Volume
25
Issue
14
Year of publication
2000
Pages
998 - 1000
Database
ISI
SICI code
0146-9592(20000715)25:14<998:RFSWAT>2.0.ZU;2-W
Abstract
An approach to treating experimental reflectometry and ellipsometry data fo r bulk samples covered by an overlayer is suggested. This approach can be u sed for measurement of optical constants of solids, characterization of ove rlayers, and probing the abruptness of the spatial distribution of a bulk d ielectric function. Numerical simulation shows that in the soft-x-ray and e xtreme-UV ranges the method can be applied for overlayers up to 3-8 nm thic k. (C) 2000 Optical Society of America OCIS codes: 340.0340, 120.4530, 120. 2130, 120.5700.