We report a direct observation of quantum dots formed spontaneously in a th
ick InGaN epilayer by high resolution transmission electron microscopy. Inv
estigation of a (280 nm thick) In0.22Ga0.78N single layer, emitting in the
blue/green spectral region, reveals quantum dots with estimated sizes in th
e range of 1.5-3 nm. Such sizes are in very good agreement with calculation
s based on the luminescence spectra of this specimen. (C) 2000 American Ins
titute of Physics. [S0003-6951(00)00930-X].