A non-destructive characterization of the structure in nanostructured thin
films and multilayers is an area of significant importance. In this context
the grazing incidence X-ray scattering (GIXS) technique has become a power
ful tool. In the present paper the various parameters that define the struc
ture in thin films and multialyers are discussed together with their origin
. The GIXS theory relevant to determining these parameters is then discusse
d in brief. The applicability of the GIXS technique to various materials is
clearly demonstrated through examples ranging from Pt-BN composite thin fi
lms to Ni-Nb/C multilayers to organic multilayers made from Cd-arachidate a
nd Zn-arachidate (metal substituted fatty acid salts). The structural param
eters of these thin films and multilayers were determined using GIXS irresp
ective of their nature inorganic or organic, indicating the suitability of
this method for 3-dimensional structural characterization.