AlGaN/GaN heterojunction bipolar transistors (HBTs) with a graded emitter-b
ase junction have been grown and fabricated. The epitaxial structures were
grown by metalorganic chemical vapor deposition on (0001) sapphire substrat
es. The HBT devices with an emitter size of 60 x 60 mu m(2) exhibit well co
ntrolled current-voltage characteristics and Gummel plots and achieve a com
mon-emitter current gain in the range beta = 4 - 10 and a common-emitter of
fset voltage V-CEoff = 4V at room temperature.