Low-energy electron microscopy

Authors
Citation
Rm. Tromp, Low-energy electron microscopy, IBM J RES, 44(4), 2000, pp. 503-516
Citations number
46
Categorie Soggetti
Multidisciplinary,"Computer Science & Engineering
Journal title
IBM JOURNAL OF RESEARCH AND DEVELOPMENT
ISSN journal
00188646 → ACNP
Volume
44
Issue
4
Year of publication
2000
Pages
503 - 516
Database
ISI
SICI code
0018-8646(200007)44:4<503:LEM>2.0.ZU;2-G
Abstract
Low-energy electron microscopy (LEEM) is a relatively new microscopy techni que, capable of high-resolution (5 nm) video-rate imaging of surfaces and i nterfaces. This opens up the possibility of studying dynamic processes at s urfaces, such as thin-film growth, strain relief, etching and adsorption, a nd phase transitions in real time, in situ, as they occur. The resulting vi deo movies contain an unprecedented amount of information that is amenable to detailed, quantitative analysis. In this paper we discuss the principles of LEEM and its application to problems in science and technology.