X-ray spectro-microscopy of complex materials and surfaces

The detailed understanding of complex materials used in information technol ogy requires the use of state-of-the-art experimental techniques that provi de information on the electronic and magnetic properties of the materials. The increasing miniaturization of components furthermore demands the use of techniques with spatial resolution down to the nanometer range. A means to satisfy both requirements is to combine the capabilities of conventional X -ray absorption spectroscopy with those of electron microscopy in a new tec hnique designated as X-ray photoemission electron microscopy. This paper re views the principles of this new spectro-microscopy approach and presents s elected applications to the study of materials of interest in information t echnology.