Monolithic integration of 1.3-mu m Stark-ladder electroabsorption waveguide modulators with multimode-interference splitters

In this letter, we describe a novel fabrication process for the monolithic integration of a waveguide power splitter based on the multimode-interferen ce effect with multiple-quantum well (MQW) electroabsorption modulators bas ed on the Stark-ladder effect. The integrated device is fabricated by a one -step epitaxy process using molecular-beam-epitaxy growth and three lithogr aphic steps that eliminates the need for aligned regrowth of the MQW modula tor. Experimental results of the modulation depth and wavelength dependence are also reported.