Optical-interference calibration of inductive displacement sensors

The technique and results of measurements of the sensitivity of an inductiv e sensor of small displacements are described. The sensitivity was measured by optical-interference monitoring of the displacement of a metallic refle ctor fixed to a piezoceramic element. It is shown that this technique ensur es the calibration of an eddy-current sensor to an accuracy of no worse tha n 1 mu m.