A microheater for conducting measurements by the scanning probe microscopy
technique at various temperatures is described. The temperature stabilizati
on accuracy is 0.05 degrees C in a range of 20-80 degrees C. A negligible t
emperature drift of 40 nm/degrees C (in the sample plane) and 100 nm/degree
s C (along the normal) allows the study of temperature-dependent structural
changes and phase transitions in polymer materials, biological objects, an
d other samples.