Data format transferring for FIB microfabrication

Citation
Yq. Fu et al., Data format transferring for FIB microfabrication, INT J ADV M, 16(8), 2000, pp. 600-602
Citations number
3
Categorie Soggetti
Engineering Management /General
Journal title
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
ISSN journal
02683768 → ACNP
Volume
16
Issue
8
Year of publication
2000
Pages
600 - 602
Database
ISI
SICI code
0268-3768(2000)16:8<600:DFTFFM>2.0.ZU;2-8
Abstract
Data format transformation is very important for 2D mid 3D nanofabrication of FIB technology because only one map file format with the extension name XBM is available in FIB workstation software. This XBM format has only a fe w drawing functions which limits the bitmap editor when creating a complica ted map file such as a spiral or a gear. Therefore, it is necessary to make use of specialised software which? can transfer map files created by other during software such as AutoCAD and CorelDRAW into the FIB machine in the required XBM map file format. The method of transferring a map file created by AutoCADR14 into the XBM format file is discussed in detail in this pape r. It is available for practical FIB micromanufacturing.