Z. Mori et al., Epitaxial SrTiO3 buffer layers for YBa2Cu3O7-delta superconducting thin films on MgO substrate, INT J MOD B, 14(9), 2000, pp. 1007-1016
SrTiO3 (STO) thin film was prepared on single crystal MgO (100) substrate b
y rf magnetron sputtering as a buffer layer of superconducting thin film. S
puttering conditions influence to the structural property were investigated
. Highly epitaxial a-axis oriented STO thin film with extremely smooth surf
ace was obtained by optimizing the sputtering parameters. YBa2Cu3O7-delta (
YBCO) thin film with critical temperature (T-c) of 89.8 K was obtained on S
TO buffer. Surface morphology of YBCO thin film was also improved. The effe
cts of STO buffer were discussed in comparison with YBCO thin films on MgO
substrate.