J. Wong-leung et al., Transmission electron microscopy characterization of secondary defects created by MeV Si, Ge, and Sn implantation in silicon, J APPL PHYS, 88(3), 2000, pp. 1312-1318
Extended defects created in Si by ion implantation to doses below the amorp
hization threshold have been studied after annealing at 800 degrees C for 1
5 min. The implant species were the group IV elements Si, Ge, and Sn, and s
tructural defects created by similar damage distribution were compared. The
mass of the implanted ion influences the type of defect observed. For all
three implant species, rod-like {311} planar defects were observed. Additio
nally, in Ge and Sn implanted samples, small {111} interstitial faulted dis
location loops were observed. (C) 2000 American Institute of Physics. [S002
1-8979(00)01615-7].