The indentation hardness and elastic modulus of leadframe materials that co
nsist of Cu alloy substrate and Ni/Pd bi-layer films of differing thickness
es are characterised using the micro-hardness and nano-indentation tests. T
he 'true' hardness of the individual substrate and film layers is evaluated
based on the empirical relationship between the measured 'composite' hardn
ess and the volume of plastically deformed material of film layers. It is f
ound that the composite hardness determined from the nano-indentation test
increases rapidly toward a peak at extremely low indentation depth of less
than about 20-30 mu m for all materials studied, due mainly to the finite v
alue of the indenter tip radius and the rough surface of the specimen on th
e nano-scale. The composite hardness for the coated specimens decreases wit
h further increasing indentation depth toward the hardness value of the sub
strate, because of the strong influence of the film/substrate interaction a
nd the indentation size effect. The nano-indentation test in general gives
higher true hardness values than those obtained from the micro-hardness tes
t. Nevertheless, the relative hardness values of the substrate and films de
termined from the two tests are consistent. The hardness of Ni film is abou
t 20 to 50% greater than that of Cu alloy, whereas the hardness of Pd film
is 7 to 11 times the Ni film in the nano-indentation test. (C) 2000 Kluwer
Academic Publishers.