Fabrication of bismuth nanowires with a silver nanocrystal shadowmask

We fabricated bismuth (Bi) nanowires with low energy electron beam lithogra phy using silver (Ag) nanocrystal shadowmasks and a subsequent chlorine rea ctive ion etching. Submicron-size metal contacts on the single Bi nanowire were successfully prepared by in situ focused ion beam metal deposition for transport measurements. The temperature dependent resistance measurements on the 50 nm wide Bi nanowires showed that the resistance increased with de creasing temperature, which is characteristic of semiconductors and insulat ors. (C) 2000 American Vacuum Society.[S0734-2101(00)03704-0].