Influence of IBED parameters on the composition and structure of titanium oxide films deposited on LTI-carbon

The chemical composition and structure of titanium oxide films deposited on Low Temperature Isotropic Carbon (LTI-carbon) by ion beam enhanced deposit ion (IBED) is jointly controlled by the process parameters of IBED. In this paper, the influence of O-2 pressure, substrate temperature and ion beam e nergy on the composition and structure of the prepared titanium oxide films was studied by means of X-ray Photo-Electron Spectroscopy (XPS), Rutherfor d Backscattering Spectroscopy (RBS), X-ray Diffraction (XRD) and Glancing A ngle X-ray Diffraction (GAXRD). The results show that the prepared films ar e polycrystalline with TiO, Ti2O3 and TiO2 as coexisting phases. The influe nce of O-2 pressure is mainly on the composition of the film. Ion beam ener gy has a great influence on the structure of the film. Neither the composit ion nor the structure of the film is sensitive to substrate temperature tha t ranged from room temperature to 300 degrees C. (C) 2000 Elsevier Science B.V. All rights reserved.