Fine finishing of diamond tools with broad ion beams

Authors
Miyamoto, I Taniguchi, J Kiyohara, S
Citation
I. Miyamoto et al., Fine finishing of diamond tools with broad ion beams, NEW DIAM FR, 10(2), 2000, pp. 63-77
Citations number
16
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY
ISSN journal
13449931 → ACNP
Volume
10
Issue
2
Year of publication
2000
Pages
63 - 77
Database
ISI
SICI code
1344-9931(2000)10:2<63:FFODTW>2.0.ZU;2-D
Abstract
This paper describes the concept and mechanism of ion beam technologies and the ion beam processing apparatus. Machining characteristics such as the d ependence of the sputtering yield or specific machining rate on the ion inc idence angle and the ion energy, and the problems and advantages of ion bea m technologies are discussed. Finally, applications of ion beam technologie s to the finishing or sharpening of diamond tools and the engraving of fine patterns into diamond chips are described.