Sc-Si normal incidence mirrors for a VUV interval of 35-50 nm

Citation
Ya. Uspenskii et al., Sc-Si normal incidence mirrors for a VUV interval of 35-50 nm, NUCL INST A, 448(1-2), 2000, pp. 147-151
Citations number
11
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
ISSN journal
01689002 → ACNP
Volume
448
Issue
1-2
Year of publication
2000
Pages
147 - 151
Database
ISI
SICI code
0168-9002(20000621)448:1-2<147:SNIMFA>2.0.ZU;2-W
Abstract
The Sc/Si multilayers are suggested as high-reflectivity coatings for a VUV interval of 35-50 nm. Fabricated mirrors show the normal incidence reflect ivity of 30-50% which is high enough to effectively manipulate the beams of synchrotron radiation and compact discharge and laser-driven X-ray lasers. The obtained values are not, however, limiting for the Sc/Si coatings. The oretical estimations as well as electron microscopy studies of Sc-Si interf aces indicate a large potential for further raising the reflectivity. (C) 2 000 Elsevier Science B.V. All rights reserved.