Citation
Vp. Nazmov et al., Modelling and manufacture of regular microstructures with high aspect ratio in acrylic plastic, NUCL INST A, 448(1-2), 2000, pp. 493-496
Citations number
7
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
ISSN journal
01689002
→ ACNP
Volume
448
Issue
1-2
Year of publication
2000
Pages
493 - 496
Database
ISI
SICI code
0168-9002(20000621)448:1-2<493:MAMORM>2.0.ZU;2-5
Abstract
The possibility of manufacture of microstructures with high aspect ratio in
industrial acrylic plastic by the method of deep X-ray lithography is inve
stigated. A characteristic dependence of the rate of dissolution of the pol
ymer on the dose of the radiation absorbed is obtained. Processing regimes
for the formation of deep structures were selected. A model for computation
of the profile of development of structures in view of large exhibition de
pth was suggested. 25 x 25 mu m through channels were obtained in sheet acr
ylic plastic 1000 mu m thick. (C) 2000 Elsevier Science B.V. All rights res
erved.