Study of properties of irradiated PMMA by the method of thin sections

Authors
El-Kholi, A Mohr, J Nazmov, V
Citation
A. El-kholi et al., Study of properties of irradiated PMMA by the method of thin sections, NUCL INST A, 448(1-2), 2000, pp. 497-500
Citations number
14
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
ISSN journal
01689002 → ACNP
Volume
448
Issue
1-2
Year of publication
2000
Pages
497 - 500
Database
ISI
SICI code
0168-9002(20000621)448:1-2<497:SOPOIP>2.0.ZU;2-O
Abstract
In deep-etch X-ray lithography while specific absorption dose changes with depth of PMMA layer. Properties of PMMA material change more quickly with d epth. Mean molecular weight, mean molecular number and glass transition tem perature versus absorption dose up to 20 kJ/cm(3) were investigated. (C) 20 00 Elsevier Science B.V. All rights reserved.