Sub-diffraction limited structuring of solid targets with femtosecond laser pulses

Possibilities to produce sub-diffraction limited structures in thin metal l ms and bulk dielectric materials using femtosecond laser pulses are investi gated. The physics of ultrashort pulse laser ablation of solids is outlined . Results on the fabrication of sub-micrometer structures in 100-200 nm chr ome-coated surfaces by direct ablative writing are reported. Polarization m aintaining optical waveguides produced by femtosecond laser pulses inside c rystalline quartz are demonstrated. (C) 2000 Optical Society of America.