At low temperatures dislocations are the dominant flux-pinning centers in t
hin films of YBa2Cu3O7-delta deposited on (100) SrTiO3 substrates [B. Dam e
t nl., Nature (London) 399, 139 (1999)]. Using a wet-chemical etching techn
ique in combination with atomic force microscopy, both the length and the l
ateral dislocation distribution are determined in laser ablated YBa2Cu3O7-d
elta A films. We find that (i) dislocations are induced in die first stages
of film growth, i.e., close to the substrate-film interface. and persist a
ll the way up to the film surface parallel to the c axis, resulting in a un
iform length distribution, and (ii) the radial dislocation distribution fun
ction exhibits a universal behavior: it approaches zero at small distances,
indicating short-range ordering of the defects. This self-organization of
the growth-induced correlated disorder makes epitaxial films completely dif
ferent from single crystals with randomly distributed columnar defects crea
ted by means of heavy-ion irradiation. Since the substrate temperature can
be used to tune the dislocation density, n(disl) over almost two orders of
magnitude (similar to 1-100/mu m(2)), the mechanism by which dislocations a
re induced is closely related to the YBa2CU3O7-delta nucleation and growth
mechanism. We present evidence for preferential precipitation in the first
monolayer and precipitate generated dislocations.