Comparison of the pH sensitivity of different surfaces on tantalum pentoxide

Authors
Chou, JC Hsiao, CN
Citation
Jc. Chou et Cn. Hsiao, Comparison of the pH sensitivity of different surfaces on tantalum pentoxide, SENS ACTU-B, 65(1-3), 2000, pp. 237-238
Citations number
4
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS B-CHEMICAL
ISSN journal
09254005 → ACNP
Volume
65
Issue
1-3
Year of publication
2000
Pages
237 - 238
Database
ISI
SICI code
0925-4005(20000630)65:1-3<237:COTPSO>2.0.ZU;2-L
Abstract
In this study, we have observed the roughness of the surfaces of amorphous tantalum pentoxide (a-Ta2O5) using Atomic Force Microscopy. The elecrrolyte -oxide-semiconductor (EOS) structure of a-Ta2O5/SiO2/p-Si/Al which was imme rsed in the different buffer solutions (pH = 1-pH = 13) measured the capaci tance and calculated the pH-sensitivity of a-Ta2O5 of the different reactin g pressures. Furthermore, the relationship between the roughness of the sur face and the pH-sensitivity of a-Ta2O5 is presented in this paper. (C) 2000 Elsevier Science S.A. All rights reserved.