Gas detection with a porous silicon based sensor

Authors
Baratto, C Comini, E Faglia, G Sberveglieri, G Di Francia, G De Filippo, F La Ferrara, V Quercia, L Lancellotti, L
Citation
C. Baratto et al., Gas detection with a porous silicon based sensor, SENS ACTU-B, 65(1-3), 2000, pp. 257-259
Citations number
6
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS B-CHEMICAL
ISSN journal
09254005 → ACNP
Volume
65
Issue
1-3
Year of publication
2000
Pages
257 - 259
Database
ISI
SICI code
0925-4005(20000630)65:1-3<257:GDWAPS>2.0.ZU;2-3
Abstract
Porous silicon (PS) layers with 60% porosity and 80 mu m thick were prepare d from n-type silicon wafer. We present the sensitivity of PS photoluminesc ence to 250 ppm of carbon monoxide. Besides the variation of conductivity o f the device due to presence of organic vapors such as chloroform, methanol , ethanol and toluene have been carried out. (C) 2000 Elsevier Science S.A. All rights reserved.