Preparation and characterisation of titanium-tungsten sensors

Authors
Guidi, V Boscarino, D Comini, E Faglia, G Ferroni, M Malagu, C Martinelli, G Rigato, V Sberveglieri, G
Citation
V. Guidi et al., Preparation and characterisation of titanium-tungsten sensors, SENS ACTU-B, 65(1-3), 2000, pp. 264-266
Citations number
4
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS B-CHEMICAL
ISSN journal
09254005 → ACNP
Volume
65
Issue
1-3
Year of publication
2000
Pages
264 - 266
Database
ISI
SICI code
0925-4005(20000630)65:1-3<264:PACOTS>2.0.ZU;2-E
Abstract
Thin films of W-Ti-O mixed oxides were prepared by reactive r.f sputtering of various Ti/W targets. Depending on the Ti/W content and annealing temper ature, nanosized films with different polycrystalline structure were achiev ed. The layers exhibit good sensing capability to NO2 with scarce influence by CO. (C) 2000 Elsevier Science S.A. All rights reserved.